[
  {
    "Header": "CurrentLayer",
    "Address": "Memory",
    "Name": "DepSequencer.CurrentLayer",
    "Type": "Int32",
    "Unit": ""
  },
  {
    "Header": "CurrentPhase",
    "Address": "Memory",
    "Name": "DepSequencer.CurrentPhase",
    "Type": "Int32",
    "Unit": ""
  },
  {
    "Header": "StepName",
    "Address": "Memory",
    "Name": "DepSequencer.StepName",
    "Type": "String",
    "Unit": ""
  },
  {
    "Header": "SequenceRunning",
    "Address": "gstEngineCtrl[0].bSequenceRunning",
    "Name": "DepSequencer.SequenceRunning",
    "Type": "Boolean",
    "Unit": ""
  },
  {
    "Header": "ChamberPressure",
    "Address": "R_DepChamberCtrl[0].rChamberPressure",
    "Name": "Chamber[0].Pressure",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "SubstrateShutterOpen",
    "Address": "gstSubstrateCtrl[0].Shutter.bOpened",
    "Name": "SeqSubstrate[0].ShutterOpen",
    "Type": "Boolean",
    "Unit": ""
  },
  {
    "Header": "SubstrateVelocity",
    "Address": "gstSubstrateCtrl[0].rActualVelocity",
    "Name": "SeqSubstrate[0].ActualSubstrateVelocity",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Substrate Heater.ActualTemperature",
    "Address": "gstHeaterCtrl[1].rActualTemp",
    "Name": "Heater[1].ActualTemperature",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Substrate Heater.CalibrationTC",
    "Address": "gstHeaterSequenceCtrl[1].rCalibrationTC",
    "Name": "Heater[1].CalibrationTC",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Substrate Heater.ActualPower",
    "Address": "gstHeaterCtrl[1].rActualPower",
    "Name": "Heater[1].ActualPower",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Substrate Heater.Status1",
    "Address": "gstHeaterCtrl[1].nStatus1",
    "Name": "Heater[1].Status",
    "Type": "UInt16",
    "Unit": ""
  },
  {
    "Header": "Substrate Heater.Status2",
    "Address": "gstHeaterCtrl[1].nStatus2",
    "Name": "Heater[1].Status2",
    "Type": "UInt16",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.ActualThickness",
    "Address": "W_SourceRateData[4].rActualThickness",
    "Name": "Source[4].ActualThickness",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.ActualRate",
    "Address": "W_SourceRateData[4].rActualRate",
    "Name": "Source[4].ActualRate",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.PercentActualPower",
    "Address": "Memory",
    "Name": "Source[4].ActualPower",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.PercentAverageActualPower",
    "Address": "Memory",
    "Name": "Source[4].AverageActualPower",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.MaterialName",
    "Address": "Memory",
    "Name": "Source[4].MaterialName",
    "Type": "String",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.SourceError",
    "Address": "R_SourceCtrl1to7[3].nControlBits[9]",
    "Name": "Source[4].SourceError",
    "Type": "Boolean",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.ManualMode",
    "Address": "R_SourceCtrl1to7[3].nControlBits[7]",
    "Name": "Source[4].ManualMode",
    "Type": "Boolean",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.RatePID_P",
    "Address": "Memory",
    "Name": "Source[4].RatePID_P",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.RatePID_I",
    "Address": "Memory",
    "Name": "Source[4].RatePID_I",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.RatePID_D",
    "Address": "Memory",
    "Name": "Source[4].RatePID_D",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.RateSetpoint",
    "Address": "Memory",
    "Name": "Source[4].RateSetpoint",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.PercentPowerSetpoint",
    "Address": "Memory",
    "Name": "Source[4].PowerSetpoint",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.OpenShutter",
    "Address": "gstSourceCtrl[4].Shutter.bOpen",
    "Name": "Source[4].OpenShutter",
    "Type": "Boolean",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.Status1",
    "Address": "R_SourceCtrl1to7[3].nStatus1",
    "Name": "Source[4].Status1",
    "Type": "UInt16",
    "Unit": ""
  },
  {
    "Header": "Resistive 4.Status2",
    "Address": "R_SourceCtrl1to7[3].nStatus2",
    "Name": "Source[4].Status2",
    "Type": "UInt16",
    "Unit": ""
  },
  {
    "Header": "Radak 3, Resistive 4.Thickness",
    "Address": "Memory",
    "Name": "Sensor[2].rThickness",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Radak 3, Resistive 4.Rate",
    "Address": "Memory",
    "Name": "Sensor[2].rRate",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Radak 3, Resistive 4.OpenShutter",
    "Address": "gstSensor[2].bOpenShutter",
    "Name": "Sensor[2].bOpenShutter",
    "Type": "Boolean",
    "Unit": ""
  },
  {
    "Header": "Radak 3, Resistive 4.SensorError",
    "Address": "gstSensor[2].bSensorError",
    "Name": "Sensor[2].bSensorError",
    "Type": "Boolean",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.ActiveSensor",
    "Address": "Memory",
    "Name": "PhysicalSensor[2].ActiveSensor",
    "Type": "Boolean",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.ShutteredRateMode",
    "Address": "Memory",
    "Name": "PhysicalSensor[2].bShutteredRateMode",
    "Type": "Boolean",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.Thickness",
    "Address": "Memory",
    "Name": "PhysicalSensor[2].rThickness",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.ThicknessMeasurement",
    "Address": "Memory",
    "Name": "PhysicalSensor[2].rRawThickness",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.Rate",
    "Address": "Memory",
    "Name": "PhysicalSensor[2].rRate",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.RateMeasurement",
    "Address": "Memory",
    "Name": "PhysicalSensor[2].rRawRate",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.AverageRate",
    "Address": "Memory",
    "Name": "PhysicalSensor[2].rAverageRate",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.FrequencyMeasurement",
    "Address": "Memory",
    "Name": "PhysicalSensor[2].rFrequency",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.PercentRemaining",
    "Address": "Memory",
    "Name": "PhysicalSensor[2].rPercentRemaining",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.SensorError",
    "Address": "gstPhysicalSensor[2].bSensorError",
    "Name": "PhysicalSensor[2].bSensorError",
    "Type": "Boolean",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.NominalToolingFactor",
    "Address": "Memory",
    "Name": "PhysicalSensor[2].NominalToolingFactor",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.ToolingFactor",
    "Address": "Memory",
    "Name": "PhysicalSensor[2].ToolingFactor",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.Density",
    "Address": "Memory",
    "Name": "PhysicalSensor[2].Density",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.ZFactor",
    "Address": "Memory",
    "Name": "PhysicalSensor[2].ZFactor",
    "Type": "Double",
    "Unit": ""
  },
  {
    "Header": "Physical Sensor 2.OpenShutter",
    "Address": "gstPhysicalSensor[2].bOpenShutter",
    "Name": "PhysicalSensor[2].bOpenShutter",
    "Type": "Boolean",
    "Unit": ""
  }
]